Test patterns for measurement of effective vacancy diffusion area

ABSTRACT

A test pattern ( 100, 200, 300, 400, 600, 700 ) has a first metal structure ( 102 ) disposed on a substrate ( 352 ), one or more intermediate layers ( 358 ) disposed above the first metal structure ( 102 ) and a second metal structure ( 104 ) disposed above the one or more intermediate layers ( 352 ). A first via ( 106 ) passes through the intermediate layers ( 352 ) and connects the first metal structure ( 102 ) to the second metal structure ( 104 ). One or more third metal structures ( 108 ) are disposed above the one or more intermediate layers ( 352 ) and the first metal structure ( 102 ). One or more second vias ( 110 ) pass through the intermediate layers ( 352 ) and connect the first metal structure ( 102 ) to the third metal structures ( 108 ). The second vias ( 110 ) are located outside of a radius (R) from a center of the first via ( 106 ). The third metal structures ( 110 ) are separated from the second metal structure ( 104 ) by a dielectric material ( 366 ).

TECHNICAL FIELD

The present invention relates in general to the field of fabricatingsemiconductor devices, and more particularly to a test pattern formeasurement of effective vacancy diffusion area.

BACKGROUND

Stress-induced via bottom voiding is a fatal reliability issue commonlyencountered in typical copper low-k dielectric interconnect structures.The formation of voids at the bottom of the vias results from the stressgradient distributions in the copper/low-k dielectric interconnectstructures, vacancies in the grain boundary of the electroplated copper,and the capability of the vacancies to diffuse through the material.

In general, the stress gradient drives the vacancies toward the viabottom through the pathways of copper grain boundary and the interfacesof copper and the underlying etch stop layer. For a given reliabilityand thermal stress/test condition, such as 175° C. and 500 hours, thereis a characteristic property, namely the effective vacancy diffusionarea, that can characterize the effective copper area within whichvacancies will be driven to the via bottom and form potentially fatalvoids.

Therefore, the effective vacancy diffusion area is unique for a givensilicon processing baseline and can be used to derive many design rulesfor a given technology node. Currently, a clear index of themetallization quality of a certain baseline process cannot be obtained.As a result, there is a need for a test pattern that can be used toderive the effective vacancy diffusion area for a given baseline processand technology node.

SUMMARY OF THE INVENTION

The preferred embodiment of the present invention provides test patternsand methods that can be used to measure the effective vacancy diffusionarea of a given baseline metallization process. In one aspect, theinvention provides for a test pattern having a first metal structuredisposed on a substrate, one or more intermediate layers disposed abovethe first metal structure, and a second metal structure disposed abovethe one or more intermediate layers. At least a portion of the secondmetal structure is disposed above the first metal structure. Inaddition, the second metal structure is smaller than the first metalstructure. The test pattern also includes a first via passing throughthe intermediate layers and connecting the first metal structure to thesecond metal structure, one or more third metal structures disposedabove the one or more intermediate layers and the first metal structure,and one or more second vias passing through the intermediate layers andconnecting the first metal structure to the third metal structures. Thesecond vias are located outside of a radius from a center of the firstvia. The third metal structures are separated from the second metalstructure by a dielectric material.

The test pattern may also include a fourth metal structure disposed onthe substrate in close proximity to the first metal structure, whereinthe one or more intermediate layers are disposed above the fourth metalstructure and another portion of the second metal structure is disposedabove the fourth metal structure. A third via passes through theintermediate layers and connects the fourth metal structure to thesecond metal structure. In addition, one or more fifth metal structuresare disposed above the one or more intermediate layers and the fourthmetal structure. The third vias are located outside of the radius from acenter of the third via. The fifth metal structures are separated fromthe second metal structure by the dielectric material. One or morefourth vias also pass through the intermediate layers and connect thefourth metal structure to the fifth metal structures.

In another aspect, the invention provides for a test pattern thatincludes two or more test substructures. Each test substructure includesa first metal structure disposed on a substrate, one or moreintermediate layers disposed above the first metal structure, and asecond metal structure disposed above the one or more intermediatelayers. At least a portion of the second metal structure is disposedabove the first metal structure. In addition, the second metal structureis smaller than the first metal structure. The test pattern alsoincludes a first via passing through the intermediate layers andconnecting the first metal structure to the second metal structure, oneor more third metal structures disposed above the one or moreintermediate layers and the first metal structure, and one or moresecond vias passing through the intermediate layers and connecting thefirst metal structure to the third metal structures. The second vias arelocated outside of a radius from a center of the first via, which isdifferent for each test substructure. The third metal structures areseparated from the second metal structure by a dielectric material. Eachtest substructure may also include a fourth metal structure disposed onthe substrate in close proximity to the first metal structure, whereinthe one or more intermediate layers are disposed above the fourth metalstructure and another portion of the second metal structure is disposedabove the fourth metal structure. A third via passes through theintermediate layers and connects the fourth metal structure to thesecond metal structure. In addition, one or more fifth metal structuresare disposed above the one or more intermediate layers and the fourthmetal structure. The fifth metal structures are separated from thesecond metal structure by the dielectric material. One or more fourthvias also pass through the intermediate layers and connect the fourthmetal structure to the fifth metal structures. The fourth vias arelocated outside of the radius from a center of the third via.

The test pattern may also include two or more test structures whereineach test structure includes the two or more test substructures whereinthe size of the first metal structure is substantially constant for eachtest substructure and different for each test structure.

In addition, the present invention provides a method for determining aneffective vacancy diffusion area for a silicon-on-insulator structure byforming two or more test substructures on the substrate, measuring aresistance between a second metal structure and a third metalstructure(s) of each test substructure before and after thermalstressing of the silicon-on-insulator structure, and determining theeffective vacancy diffusion area based on a change in the resistancemeasurements. Each test substructure includes a first metal structuredisposed on a substrate, one or more intermediate layers disposed abovethe first metal structure and the second metal structure disposed abovethe one or more intermediate layers. At least a portion of the secondmetal structure is disposed above the first metal structure. Inaddition, the second metal structure is smaller than the first metalstructure. The test substructure also includes a first via passingthrough the intermediate layers and connecting the first metal structureto the second metal structure. The third metal structure(s) are disposedabove the one or more intermediate layers and the first metal structure.One or more second vias pass through the intermediate layers and connectthe first metal structure to the third metal structures. The second viasare located outside of a radius from a center of the first via, which isdifferent for each test substructure. The third metal structures areseparated from the second metal structure by a dielectric material.

DESCRIPTION OF THE DRAWINGS

For a more complete understanding of the present invention, and theadvantages thereof, reference is now made to the following descriptionstaken in conjunction with the accompanying drawing, in which:

FIG. 1 is a diagram of a test structure/substructure in accordance withone embodiment of the present invention;

FIG. 2 is a diagram of a test structure/substructure in accordance withanother embodiment of the present invention;

FIG. 3A is a diagram of a test structure/substructure in accordance withanother embodiment of the present invention;

FIG. 3B is a cross-sectional view of the test structure/substructure ofFIG. 3A in accordance with one embodiment of the present invention;

FIG. 4 is a diagram of a test structure/substructure in accordance withanother embodiment of the present invention;

FIG. 5 is a flow chart illustrating the method for determining aneffective vacancy diffusion area in accordance with the presentinvention;

FIG. 6 is a diagram of a test pattern in accordance with one embodimentof the present invention; and

FIGS. 7A and 7B show a diagram of a test pattern in accordance withanother embodiment of the present invention.

DETAILED DESCRIPTION OF ILLUSTRATIVE EMBODIMENTS

The making and using of the presently preferred embodiments arediscussed in detail below. It should be appreciated, however, that thepresent invention provides many applicable inventive concepts that canbe embodied in a wide variety of specific contexts. The specificembodiments discussed are merely illustrative of specific ways to makeand use the invention, and do not limit the scope of the invention.

The preferred embodiments of the present invention provide a testpattern and method that can be used to measure the effective vacancydiffusion area of a certain baseline metallization process. In general,the test pattern includes a hump structure. For example, the testpattern can include a first metal structure underlying a second metalstructure and electrically coupled thereto by a via. The area of thefirst metal structure is preferably larger than that of the second metalstructure and the first via is connected at or near the center of thefirst metal structure.

The sensitivity of the test pattern can be increased by increasing thearea or volume of the first metal structure since any vacancies embeddedin the grain boundary of the metal are proportional to the underlyingmetal volume/area. As a result, the size ratio of the first metalstructure to the second metal structure will be determined by theprocess being used and the desired sensitivity of the test pattern.

One or more second vias, also referred to as dummy vias, can positionedon a circle approximately centered on the first via and having a radiusof R. Increasing the number of second vias will make the test patternmore sensitive to the resistance variation. The dummy vias are connectedto a third metal structure, also referred to as a dummy metal island.The radius R is varied for different test structures within the testpattern. R_(o) is considered to be the effective vacancy diffusion areaof the baseline metallization process. Test patterns having a radius Rsmaller than or equal to Ro show no failure in terms of their electricalproperties.

Once the effective diffusion area is measured, copper/low-kinterconnects can be designed to avoid the stress-induced voiding andenhance the product reliability. In addition, the strength of thebaseline metallization processes can be monitored and indexed with thecomparison of their effective vacancy diffusion area; the smaller theeffective vacancy diffusion area, the better the baseline or a recipe.

Now referring to FIG. 1, a diagram of a test structure 100 in accordancewith one embodiment of the present invention is shown. This embodimentof the present invention provides a test pattern having a first metalstructure 102 disposed over a substrate. One or more intermediate layersare disposed above the first metal structure 102. Intermediate layersare typically a dielectric such as silicon dioxide or silicon nitride. Asimilar cross-section is shown in FIG. 3B.

A second metal structure 104 is disposed above the one or moreintermediate layers. At least a portion of the second metal structure104 is disposed above the first metal structure 102. In addition, thesecond metal structure 104 is smaller than the first metal structure102.

The test pattern also includes a first via 106 passing through theintermediate layers and connecting the first metal structure 102 to thesecond metal structure 104. The first via 106 is approximately centeredover the first metal structure 102. One or more third metal structures108 are disposed above the one or more intermediate layers and the firstmetal structure 102. The third metal structures are separated from thefirst metal structure 102 and the second metal structure 104 bydielectric material.

In addition, one or more second vias 110 pass through the intermediatelayers and electrically connect the first metal structure 102 to thethird metal structures 108, respectively. As shown in FIG. 1, eachsecond via 110 is connected to a separate third metal structure 108. Inan alternate embodiment, all of the second vias 110 are connected to asingle third metal structure 108. Moreover, the present invention is notlimited to the four second vias 110 shown because the actual number ofsecond vias 110 will be determined in part on the desired sensitivity ofthe test structure/substructure 100.

The second vias 110 are located outside of a radius R from a center ofthe first via 106. The radius R is selected to measure the effectivevacancy diffusion area, typically within a range of about 0.5 and about10 μm. Preferably, first metal structure 102 is a copper structureformed within a first dielectric layer using a damascene or dualdamascene process, and second metal structure 104 and third metalstructures 108 are copper structures formed in the interveningdielectric layer also using a damascene or dual damascene process. Inthe case of the dual damascene process, vias 106 and 110 are formedsimultaneously with the formation of metal structures 108 and 104.

In the preferred embodiments, the test pattern is disposed on asilicon-on-insulator structure wherein the intermediate layerssubstantially comprise a dielectric material. The dielectric material istypically a low-k dielectric material, which may be chosen from thegroup consisting of polymide, silicon oxycarbide, hydrogensilsesquioxane, methyl silsesquioxane, bezocyclobutene, fluorinatedglass, fluorinated aromatic ether, inter-penetrated SOG, SILK™,Nanoglass™, Coral™ and Black Diamond™.

Each metal structure 102, 104 and 108 is typically a metal structureformed using a damascene or dual damascene process. The first metalstructure 102, second metal structure 104, third metal structure 108,first via 106 and second vias 110 are typically copper. The first metalstructure 102 typically has an area selected from a range of about 100to about 500 μm², e.g., planar dimensions of 20 μm by a multiple of 3μm. In addition, the second metal structure 104 and the one or morethird metal structures 108 are typically separated by a multiple of 0.5μm.

Referring now to FIG. 2, a diagram of a test structure/substructure 200in accordance with another embodiment of the present invention is shown.The preferred embodiment provides a test pattern having a first metalstructure 202 disposed on a substrate, one or more intermediate layersdisposed above the first metal structure 202 and a second metalstructure 204 disposed above the one or more intermediate layers. Atleast a portion of the second metal structure 204 is disposed above thefirst metal structure 202. Once again, the second metal structure 204 ispreferably smaller than the first metal structure 202.

As in the first embodiment, the test pattern also includes a first via206 passing through the intermediate layers and connecting the firstmetal structure 202 to the second metal structure 204. The first via 206is approximately centered over the first metal structure 202. One ormore third metal structures 208 are disposed above the one or moreintermediate layers and the first metal structure 202 and arerespectively electrically connected thereto by one or more second vias210.

As shown in FIG. 2, each second via 210 is connected to a separate thirdmetal structure 208. But, all of the second vias 210 can be connected toa single third metal structure 208. FIG. 3A illustrates such anembodiment. The second vias 210 are located outside of a radius R from acenter of the first via 206. The radius R is selected to measure theeffective vacancy diffusion area, typically within a range of 0.5 and 10μm.

The test pattern also includes a fourth metal structure 212 disposedover the substrate in close proximity to the first metal structure 202.The one or more intermediate layers are disposed above the fourth metalstructure 212 and another portion of the second metal structure 204 isdisposed above the fourth metal structure 212. A third via 216 passesthrough the intermediate layers and connects the fourth metal structure212 to the second metal structure 204. The third via 216 isapproximately centered over the fourth metal structure 212.

In addition, one or more fifth metal structures 218 are disposed abovethe one or more intermediate layers and the fourth metal structure 212.The fifth metal structures 218 are separated from the second metalstructure 204 by the dielectric material. One or more fourth vias 220also pass through the intermediate layers and connect the fourth metalstructure 212 to the fifth metal structures 218. The fourth vias 220 arelocated outside of the radius R from a center of the third via 216. Asshown, each fourth via 220 is connected to a separate fifth metalstructure 218. But, all of the fourth vias 220 can be connected to asingle fifth metal structure 218. FIG. 3A illustrates such anembodiment. Preferably, the radius R of the second test structure 212 isdifferent than the radius R of the first test structure 202.

The test pattern is disposed on more than one layer of asilicon-on-insulator structure wherein the intermediate layerssubstantially comprise a dielectric material. The dielectric material istypically a low-k dielectric material, which may be chosen from thegroup consisting of polymide, silicon oxycarbide, hydrogensilsesquioxane, methyl silsesquioxane, bezocyclobutene, fluorinatedglass, fluorinated aromatic ether, inter-penetrated SOG, SILK™,Nanoglass™, Coral™ and Black Diamond™. Each metal structure 202, 204,208, 212 and 218 is typically a metal structure formed using a damasceneor dual damascene process. The first metal structure 202, second metalstructure 204, third metal structure 208, fourth metal structure 212,fifth metal structure 218, first via 206, second vias 210, and thirdvias 220 are typically copper. The first metal structure 102 and fourthmetal structure 212 typically have an area selected from a range of 100to 500 μm², e.g., planar dimensions of 20 μm by a multiple of 3 μm. Inaddition, the separation between the second metal structure 204 and thethird and fifth metal structures 208 and 218 is typically a multiple of0.5 μm.

In one embodiment of the present invention, the planar dimensions of thefirst metal structure are 20 μm by a multiple of ³ μm, the second metalstructures are at least 0.11 μm by 10 μm, and the third metal structuresare at least 0.3 μm by 0.3 μm. In addition, the second metal structureand the one or more third metal structures are separated by a multipleof 0.5 μm, and the first via and second vias have a width of at least0.1 μm. The following table provides some representative values for thedimensions illustrated in FIG. 2.

Dimensions (μm) A B C D E F G H 0.3 0.1 0.11 10 0.005 6 to 12 20 0.5 to5.0

Now referring to FIG. 3A, a diagram of a test structure/substructure 300in accordance with another embodiment of the present invention is shown.The present invention provides a test pattern having a first metalstructure 302 disposed on a substrate, one or more intermediate layersdisposed above the first metal structure 302 and a second metalstructure 304 disposed above the one or more intermediate layers. Atleast a portion of the second metal structure 304 is disposed above thefirst metal structure. In addition, the second metal structure 304 issmaller than the first metal structure 302. The test pattern alsoincludes a first via 306 passing through the intermediate layers andconnecting the first metal structure 302 to the second metal structure304. The first via 306 is approximately centered over the first metalstructure 302.

One or more third metal structures 308 are disposed above the one ormore intermediate layers and the first metal structure 302. The thirdmetal structures 308 are separated from the second metal structure 304by a dielectric material. In addition, one or more second vias 310 passthrough the intermediate layers and connect the first metal structure302 to the third metal structures 308. As shown, all of the second vias310 are connected to a single third metal structure 308. The second vias310 are located outside of a radius R from a center of the first via306. The radius R is selected to measure the effective vacancy diffusionarea, typically within a range of 0.5 and 10 μm.

The test pattern also includes a fourth metal structure 312 disposed onthe substrate in close proximity to the first metal structure 302,wherein the one or more intermediate layers are disposed above thefourth metal structure 312 and another portion of the second metalstructure 304 is disposed above the fourth metal structure 312. A thirdvia 316 passes through the intermediate layers and connects the fourthmetal structure 312 to the second metal structure 304. The third via 316is approximately centered over the fourth metal structure 312. Inaddition, one or more fifth metal structures 318 are disposed above theone or more intermediate layers and the fourth metal structure 312. Thefifth metal structures 318 are separated from the second metal structure304 by the dielectric material. One or more fourth vias 320 also passthrough the intermediate layers and connect the fourth metal structure312 to the fifth metal structures 318. As shown, all of the fourth vias320 are connected to a single fifth metal structure 318. The fourth vias320 are located outside of the radius R from a center of the third via316.

The test pattern is disposed on more than one layer of asilicon-on-insulator structure wherein the intermediate layerssubstantially comprise a dielectric material. The dielectric material istypically a low-k dielectric material, which may be chosen from thegroup consisting of polymide, silicon oxycarbide, hydrogensilsesquioxane, methyl silsesquioxane, bezocyclobutene, fluorinatedglass, fluorinated aromatic ether, inter-penetrated SOG, SILK™,Nanoglass™, Coral™ and Black Diamond™. Each metal structure 302, 304,308, 312 and 318 is typically a metal structure formed using a damasceneor dual damascene process. The first metal structure 302, second metalstructure 304, third metal structure 308, fourth metal structure 312,fifth metal structure 318, first via 306, second vias 310, and thirdvias 320 are typically copper. The first metal structure 302 and fourthmetal structure 312 typically have an area selected from a range of 100to 500 μm², e.g., planar dimensions of 20 μm by a multiple of 3 μm. Inaddition, the separation between the second metal structure 304 and thethird and fifth metal structures 308 and 318 is typically a multiple of0.5 μm.

Referring now to FIG. 3B, a cross-sectional view of the teststructure/substructure 300 of FIG. 3A in accordance with one embodimentof the present invention is shown. The lower layer 352 can be thesemiconductor substrate, silicon-on-insulator structure or anyprocessing layer (e.g., an intermetal dielectric) preceding the teststructure/substructure layers 354. The test structure/substructure layerincludes a first structure layer 356, one or more intermediate layers358 and a second structure layer 360. The first structure layer 356includes the first metal structure 302 and second metal structure 312separated by a dielectric material 362.

The intermediate layers 358 include the first via 306, second vias 310,third via 316 and fourth vias 320 separated by dielectric material 364.The second structure layer 360 includes the second metal structure 304,third metal structure 308 and fifth metal structure 318 separated bydielectric material 366. Dielectric material 362, 364 and 366 istypically a low-k dielectric material, which can be the same material ordifferent depending on the situation. The dielectric material may bechosen from the group consisting of polymide, silicon oxycarbide,hydrogen silsesquioxane, methyl silsesquioxane, bezocyclobutene,fluorinated glass, fluorinated aromatic ether, inter-penetrated SOG,SILK™, Nanoglass™, Coral™ and Black Diamond™. Each metal structure 302,304, 308, 312 and 318 is typically a metal structure, such as copper,formed using a damascene or dual damascene process. The teststructure/substructure 300 can be created using standard processingtechniques, such as a standard trench first dual damascene ICfabrication process. The metal structures 302, 304, 308, 312 and 318 canbe damascene structures, multi-layer damascene structures, modifieddamascene structures, or other structures. The vias 306, 310, 316 and320 are typically copper and can be created using standard processingtechniques.

Now referring to FIG. 4, a diagram of a test structure/substructure 400in accordance with another embodiment of the present invention is shown.The test pattern includes a first metal structure 402 disposed on asubstrate, one or more intermediate layers disposed above the firstmetal structure 402, and a second metal structure 404 disposed above theone or more intermediate layers. At least a portion of the second metalstructure 404 is disposed above the first metal structure 402. Inaddition, the second metal structure 404 is smaller than the first metalstructure 402. The test pattern also includes a first via 406 passingthrough the intermediate layers and connecting the first metal structure402 to the second metal structure 404. The first via 406 isapproximately centered over the first metal structure 402. One or morethird metal structures 408 are disposed above the one or moreintermediate layers and the first metal structure 402. The third metalstructures 408 are separated from the second metal structure 404 by adielectric material. In addition, one or more second vias 410 passthrough the intermediate layers and connect the first metal structure402 to the third metal structures 408. As shown, each second via 410 isconnected to a separate third metal structure 408. The second vias 410are located outside of a radius R from a center of the first via 406.The radius R is selected to measure the effective vacancy diffusionarea, typically within a range of 0.5 and 0.10 μm.

The test pattern also includes a fourth metal structure 412 disposed onthe substrate in close proximity to the first metal structure 402,wherein the one or more intermediate layers are disposed above thefourth metal structure 412, and another portion of the second metalstructure 404 is disposed above the fourth metal structure 412. A thirdvia 416 passes through the intermediate layers and connects the fourthmetal structure 412 to the second metal structure 404. The third via 416is approximately centered over the fourth metal structure 412. Inaddition, one or more fifth metal structures 418 are disposed above theone or more intermediate layers and the fourth metal structure 412. Thefifth metal structures 418 are separated from the second metal structure404 by the dielectric material. One or more fourth vias 420 also passthrough the intermediate layers and connect the fourth metal structure412 to the fifth metal structures 418. The fourth vias 420 are locatedoutside of the radius R from a center of the third via 416. As shown,each fourth via 420 is connected to a separate fifth metal structure418.

The test pattern is disposed on more than one layer of asilicon-on-insulator structure wherein the intermediate layerssubstantially comprise a dielectric material. The dielectric material istypically a low-k dielectric material, which may be chosen from thegroup consisting of polymide, silicon oxycarbide, hydrogensilsesquioxane, methyl silsesquioxane, bezocyclobutene, fluorinatedglass, fluorinated aromatic ether, inter-penetrated SOG, SILK™,Nanoglass™, Coral™ and Black Diamond™. Each metal structure 402, 404,408, 412 and 418 is typically a metal structure formed using a damasceneor dual damascene process. The first metal structure 402, second metalstructure 404, third metal structure 408, fourth metal structure 412,fifth metal structure 418, first via 406, second vias 410, and thirdvias 420 are typically copper. The first metal structure 102 and fourthmetal structure 412 typically have an area selected from a range of 100to 500 μm², e.g., planar dimensions of 20 μm by a multiple of 3 μm. Inaddition, the separation between the second metal structure 404 and thethird and fifth metal structures 408 and 418 is typically a multiple of0.5 μm.

Referring now to FIG. 5, a flow chart illustrating the method 500 fordetermining an effective vacancy diffusion area in accordance with thepreferred embodiment of the present invention is shown. The method 500is performed by forming two or more test substructures on the substratein block 502, measuring a resistance between a second metal structureand a third metal structure(s) of each test substructure before andafter thermal stressing of the silicon-on-insulator structure in block504, and determining the effective vacancy diffusion area based on achange in the resistance measurements in block 506. Note that the radiusR between the center via and the surrounding vias is different for eachsubstructure and that the effective vacancy diffusion area is determinedfrom the substructure having a radius R that results in an acceptablyhigh resistance level after thermal stress testing. Note that theresistance can also be measured during the thermal stressing. Thethermal stressing is typically performed between 125° C. and 300° C.over a duration of between 100 and 1000 hours, e.g., approximately 175°C. for 500 hours. In the preferred embodiments, the threshold fordetermining that the resistance is unacceptably high is a specifiedcontact resistance variation, such as 10%, 20% or 100% depending on thetesting parameters.

As previously described with reference to FIGS. 1, 2, 3A, 3B and 4, eachtest substructure includes a first metal structure disposed on asubstrate, one or more intermediate layers disposed above the firstmetal structure and the second metal structure disposed above the one ormore intermediate layers. At least a portion of the second metalstructure is disposed above the first metal structure. In addition, thesecond metal structure is smaller than the first metal structure. Thetest substructure also includes a first via passing through theintermediate layers and connecting the first metal structure to thesecond metal structure. The third metal structure(s) are disposed abovethe one or more intermediate layers and the first metal structure. Oneor more second vias pass through the intermediate layers and connect thefirst metal structure to the third metal structures. The third metalstructures are located outside of a radius from a center of the firstvia, which is different for each test substructure, and are separatedfrom the second metal structure by a dielectric material.

Each test substructure may also include a fourth metal structuredisposed on the substrate in close proximity to the first metalstructure, wherein the one or more intermediate layers are disposedabove the fourth metal structure and another portion of the second metalstructure is disposed above the fourth metal structure, a third viapassing through the intermediate layers and connecting the fourth metalstructure to the second metal structure, one or more fifth metalstructures disposed above the one or more intermediate layers and thefourth metal structure, and outside of the radius from a center of thethird via, the fifth metal structures separated from the second metalstructure by the dielectric material, and one or more fourth viaspassing through the intermediate layers and connecting the fourth metalstructure to the fifth metal structures.

The step of forming two or more test substructures on the substrate mayinclude the step of forming two or more test structures on thesubstrate, each test structure containing the two or more testsubstructures wherein the size of the first metal structure issubstantially constant for each test substructure and different for eachtest structure. For example, the test pattern may include three teststructures having ten test substructures in the first test structure,seven test substructures in the second test structure and four testsubstructures in the third test structure.

Now referring to FIG. 6, a diagram of a test pattern 600 in accordancewith one embodiment of the present invention is shown. The test pattern600 includes two or more test substructures, such as test substructures602, 604, 606, 608, 610, 612, 614, 616, 618 and 620. As shown, the testsubstructures 602-620 are constructed in accordance with testsubstructure 300 (FIGS. 3A and 3B). Note that the test substructures602-620 can be any combination or variation of the examples shown inFIGS. 1, 2, 3A, 3B, and 4. Each test substructure has a different radiusR: Test substructure 602 has radius R₁, test substructure 604 has radiusR₂, test substructure 606 has radius R₃, test substructure 608 hasradius R₄, test substructure 610 has radius R₅, test substructure 612has radius R₆, test substructure 614 has radius R₇, test substructure616 has radius R₈, test substructure 618 has radius R₉, and testsubstructure 620 has radius R₁₀. The test substructures 602-620 can beadjacent to one another or arranged in a block pattern or some otherpattern to fit the designated space and testing requirements. The radiiR₁ to R₁₀ are selected to provide a good determination of the effectivevacancy diffusion area.

Referring now to FIGS. 7A and 7B, a diagram of a test pattern 700 inaccordance with another embodiment of the present invention is shown.The test pattern 700 includes three test structures 702, 750 and 780.Each test structure 702, 750 and 780 contains two or more testsubstructures 704-722, 752-764 and 782-788 wherein the size of the firstmetal structure is substantially constant for each test substructure anddifferent for each test structure (F1 for each test substructure 704-722in test structure 702, F2 for each test substructure 752-764 in teststructure 750, and F3 for each test substructure 782-788 in testsubstructure 780. As shown, the test substructures 704-722, 752-764 and782-788 are constructed in accordance with test substructure 300 (FIGS.3A and 3B). Note that the test substructures 704-722, 752-764 and782-788 can be any combination or variation of the examples shown inFIGS. 1, 2, 3A, 3B, and 4. Within each test structure 702, 750 and 780,each test substructure 704-722, 752-764 and 782-788 has a differentradius R, for example.

Test structure 702 contains test substructure 704 having radius R₁, testsubstructure 706 having radius R₂, test substructure 708 having radiusR₃, test substructure 710 having radius R₄, test substructure 712 havingradius R₅, test substructure 714 having radius R₆, test substructure 716having radius R₇, test substructure 718 having radius R₈, testsubstructure 720 having radius R₉, and test substructure 722 havingradius R₁₀.

Test structure 750 contains test substructure 752 having radius R₁₁,test substructure 754 having radius R₁₂, test substructure 756 havingradius R₁₃, test substructure 758 having radius R₁₄, test substructure760 having radius R₁₅, test substructure 762 having radius R₁₆, and testsubstructure 764 having radius R₁₇.

Test structure 780 contains test substructure 782 having radius R₁₈,test substructure 784 having radius R₁₉, test substructure 786 havingradius R₂₀, and test substructure 788 having radius R₂₁.

The test substructures 704-722, 752-764 and 782-788 can be adjacent toone another or arranged in a block pattern or some other pattern to fitthe designated space and testing requirements. The radii R₁ to R₂₁, areselected to provide a good determination of the effective vacancydiffusion area.

The desired radius R can be achieved by specifying the separationbetween the second metal structure and the one or more third metalstructures within the test substructures. For example, the second metalstructure and the one or more third metal structures within the first,second, third, fourth, fifth, sixth, seventh, eighth, ninth and tenthtest substructures of the first test structure are separated byapproximately 0.5, 1, 1.5, 2, 2.5, 3, 3.5, 4, 4.5 and 5 μm,respectively. The second metal structure and the one or more third metalstructures within the first, second, third, fourth, fifth, sixth andseventh test substructures of the second test structure are separated byapproximately 0.5, 1, 1.5, 2, 2.5, 3 and 3.5 μm, respectively. Thesecond metal structure and the one or more third metal structures withinthe first, second, third and fourth test substructures of the third teststructure are separated by approximately 0.5, 1, 1.5 and 2 μm,respectively. The first width for the first test substructure, secondtest substructure, third test substructure, fourth test substructure andfifth test substructure is approximately 3, 5, 10, 15 and 20 μm,respectively. The first metal structure of each test substructure of thefirst test structure is approximately 240 μm². The first metal structureof each test substructure of the second test structure is approximately180 μm². The first metal structure of each test substructure of thethird test structure is approximately 120 μm².

The following table lists the dimensions for the test substructures inaccordance with one implementation of the present invention. The testpattern illustrated includes twelve test structures with each teststructure having five test substructures.

Test Pattern Sub- No. Structure structure Dimensions (μm) of No. No. A BC D E F G H Vias 1 1 0.3 0.1 0.11 10 0.005 12 20 0.5 18 2 0.3 0.1 0.1110 0.005 12 20 1.0 18 3 0.3 0.1 0.11 10 0.005 12 20 1.5 18 4 0.3 0.10.11 10 0.005 12 20 2.0 18 5 0:3 0.1 0.11 10 0.005 12 20 2.5 18 6 0.30.1 0.11 10 0.005 12 20 3.0 18 7 0.3 0.1 0.11 10 0.005 12 20 3.5 18 80.3 0.1 0.11 10 0.005 12 20 4.0 18 9 0.3 0.1 0.11 10 0.005 12 20 4.5 1810 0.3 0.1 0.11 10 0.005 12 20 5.0 18 2 1 0.3 0.1 0.11 10 0.005 9 20 0.518 2 0.3 0.1 0.11 10 0.005 9 20 1.0 18 3 0.3 0.1 0.11 10 0.005 9 20 1.518 4 0.3 0.1 0.11 10 0.005 9 20 2.0 18 5 0.3 0.1 0.11 10 0.005 9 20 2.518 6 0.3 0.1 0.11 10 0.005 9 20 3.0 18 7 0.3 0.1 0.11 10 0.005 9 20 3.518 3 1 0.3 0.1 0.11 10 0.005 6 20 0.5 18 2 0.3 0.1 0.11 10 0.005 6 201.0 18 3 0.3 0.1 0.11 10 0.005 6 20 1.5 18 4 0.3 0.1 0.11 10 0.005 6 202.0 18

Accordingly, the first width for the first test substructure, secondtest substructure, third test substructure, fourth test substructure andfifth test substructure is approximately 3, 5, 10, 15 and 20 μm,respectively. The second width for each test structure ranges from about0.1 to 0.8 μm.

While several embodiments of the invention, together with modificationsthereof, have been described in detail herein and illustrated in theaccompanying drawings, it will be evident that various modifications arepossible without departing from the scope of the present invention. Theexamples given are intended to be illustrative rather than exclusive.The drawings may not necessarily be to scale and features may be shownin a schematic form.

1. A test pattern comprising: a first metal structure disposed over asubstrate; one or more intermediate layers disposed above the firstmetal structure; a second metal structure disposed above the one or moreintermediate layers, wherein at least a portion of the second metalstructure is above the fast metal structure and the second metalstructure is smaller than the first metal structure; a first via passingthrough the intermediate layers and connecting the first metal structureto the second metal structure; one or more third metal structuresdisposed above the one or more intermediate layers and the first metalstructure, and separated from the second metal structure by a dielectricmaterial; and one or more second vias passing through the intermediatelayers and connecting the first metal structure to the third metalstructure each second via located a predetermined radius from the centerof the first via.
 2. The test pattern as recited in claim 1, wherein theradius is selected to measure an effective vacancy diffusion area. 3.The test pattern as recited in claim 1, further comprising: a fourthmetal structure disposed on the substrate in close proximity to thefirst metal structure, wherein the one or more intermediate layers aredisposed above the fourth metal structure and another portion of thesecond metal structure is disposed above the fourth metal structure; athird via passing through the intermediate layers and connecting thefourth metal structure to the second metal structure; one or more fifthmetal structures disposed above the one or more intermediate layers andthe fourth metal structure, and separated from the second metalstructure by the dielectric material; and one or more fourth viaspassing through the intermediate layers and connecting the fourth metalstructure to the fifth metal structures each fourth via located outsideof a predetermined radius from the center of the third via.
 4. The testpattern as recited in claim 1, wherein the first via is approximatelycentered over the first metal structure.
 5. The test pattern as recitedin claim 1, wherein each second via is connected to a separate thirdmetal structure.
 6. The test pattern as recited in claim 1, wherein allof the second vias are connected to a single third metal structure. 7.The test pattern as recited in claim 1, wherein the intermediate layerssubstantially comprise a dielectric material.
 8. The test pattern asrecited in claim 7, wherein the dielectric material is a low-kdielectric material.
 9. The test pattern as recited in claim 8, whereinthe low-k dielectric material is chosen from the group consisting ofpolymide, silicon oxycarbide, hydrogen silsesquioxane, methylsilsesquioxane, benzocyclobutene, fluorinated glass, fluorinatedaromatic ether, and inter-penetrated spin-on glass.
 10. The test patternas recited in claim 1, wherein the first metal structure, second metalstructure and third metal structure comprise copper.
 11. The testpattern as recited in claim 1, wherein the first via and second viascomprise copper.
 12. The test pattern as recited in claim 1, wherein theradius is within a range of about 0.5 μm to about 10 μm.
 13. The testpattern as recited in claim 1, wherein the first metal structure has anarea selected from a range of about 100 μm to about 500 μm2.
 14. Thetest pattern as recited in claim 1, wherein the first metal structureplanar dimensions are about 20 μm by a multiple of about 3 μm.
 15. Thetest pattern as recited in claim 1, wherein the second metal structureand the one or more third metal structures are separated by a multipleof about 0.5 μm.
 16. The test pattern as recited in claim 1, wherein:the first metal structure planar dimensions are 20 μm by a multiple of 3μm; the second metal structure planar dimensions are at least 0.11 μm by10 μm; the third metal structure planar dimensions are at least 0.3 μmby 0.3 μm; the second metal structure and the one or more third metalstructures are separated by a multiple of 0.5 μm; and the first via andsecond vias have a width of at least 0.1 μm.
 17. A test patterncomprising: two or more test substructures; and each test substructurecomprising: a first metal structure disposed on a substrate; one or moreintermediate layers disposed above the first metal structure; a secondmetal structure disposed above the one or more intermediate layers,wherein at least a portion of the second metal structure is above thefirst metal structure and the second metal structure is smaller than thefist metal structure; a first via passing through the intermediatelayers and connecting the first metal structure to the second metalstructure; one or more third metal structures disposed above the one ormore intermediate layers and the first metal structure, and separatedfrom the second metal structure by a dielectric material; and one ormore second vias passing through the intermediate layers andrespectively connecting the first metal structure to the third metalstructures, each second via located outside of a predetermined radiusfrom a center of the first via, which predetermined radius is differentfor each test substructure.
 18. The test pattern as recited in claim 17,wherein each test substructure further comprises: a fourth metalstructure disposed on the substrate in close proximity to the firstmetal structure; wherein the one or more intermediate layers aredisposed above the fourth metal structure and another portion of thesecond metal structure is disposed above the fourth metal structure; athird via passing through the intermediate layers and connecting thefourth metal structure to the second metal structure; one or more fifthmetal structures disposed above the one or more mediate layers and thefourth metal stir, and separated from the second metal structure by thedielectric material; and one or more fourth vias passing through theintermediate layers and respectively connecting the fourth metalstructure to the fifth metal structures, each fourth via outside of apredetermined radius from the center of the third via.
 19. The testpattern as recited in claim 17, further comprising two or more teststructures, wherein each test structure comprises the two or more testsubstructures, and wherein the size of the first meal structure issubstantially constant for each test substructure and substantiallydifferent for each test structure.
 20. A test pattern comprising: two ormore test structures, each test structure further comprising: two ormore test substructures, each test substructure further comprising: afirst metal structure disposed on a substrate; one or more intermediatelayers disposed above the first metal structure; a second metalstructure disposed above the one or more intermediate layers, wherein atleast a portion of the second metal structure is above the first metalstructure and the second metal structure is smaller than the first metalstructure; a first via passing through the intermediate layers andconnecting the first metal structure to the second metal structure; oneor more third metal structures disposed above the one or moreintermediate layers and the first metal structure, and separated fromthe second metal structure by a dielectric material; and one or moresecond vias passing through the intermediate layers and respectivelyconnecting the first metal structure to the third metal structures, eachsecond via located outside of a predetermined radius form a center ofthe first via, which predetermined radius is different for each testsubstructure.
 21. The test pattern of claim 20, wherein the area of thefirst metal structure of the two or more test structures for any one ofthe two or more test structures is different from the area of the firstmetal structure of the two or more test substructures for any other oneof the two or more test structures.
 22. The test pattern of claim 20wherein the predetermined radius is selected to measure an effectivelyvacancy diffusion area.
 23. The test pattern of claim 20, wherein eachof the two or more test substructures further comprises: a fourth metalstructure disposed on the substrate in close proximity to the firstmetal structure; wherein in one or more intermediate layers are disposedabove the fourth metal structure and another portion of the second metalstructure is disposed above the fourth metal structure; a third viapassing through the intermediate layers and connecting the fourth metalstructure to the second metal structure; one or more fifth metalstructures disposed above the one or more intermediate layers and thefourth metal structure, and separated from the second metal structure bythe dielectric material; and one or more fourth vias passing through theintermediate layers and respectively connecting the fourth metalstructure to the fifth metal structures, each fourth via outside of apredetermined radius from the center of the third via, which radius isdifferent for each test substructure.
 24. The test pattern of claim 23wherein each of the first and fourth metal structures for the two ormore test substructures for any one of the test structures haveapproximately equal area which is different from the area of the firstand fourth metal structures for the two or more test substructures forany other one of the test structures.
 25. The test pattern of claim 23wherein the predetermined radius is selected to measure an effectivevacancy diffusion area.